Abstract
Based on the theory of parallel plate electrostatic field with edge effect, the formulas of the capacitance and the electrostatic force of comb-drive structure are derived, and the electrostatic characteristic of the structure is analyzed, which are compared to the results of a finite element method simulation. When the moving fingers are closed to the fixed fingers, pull-in effect occurs, therefore moving range is analyzed in quantity, and the maximum applied voltage is discussed, to provide a theoretical basis for structural design.
| Original language | English |
|---|---|
| Pages (from-to) | 1-3 |
| Number of pages | 3 |
| Journal | Dongbei Daxue Xuebao/Journal of Northeastern University |
| Volume | 29 |
| Issue number | SUPPL. |
| Publication status | Published - Jun 2008 |
Keywords
- Comb-drive
- Edge effect
- Electrostatic forces
- MEMS