Fingerprint
Dive into the research topics of 'Effects of substrate materials and deposition parameters on film stress'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of substrate materials and deposition parameters on film stress
Yuqiong Li, Zhinong Yu*, Huaqing Wang, Weiqiang Lu, Wei Xue, Zhao Ding
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
7
Citations
(Scopus)