Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target

Linao Zhang, Shuo Tong, Haonan Liu, Yinglan Li, Zhi Wang*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effects of sputtering and assisting ions on the orientation of titanium nitride films fabricated by ion beam assisted sputtering deposition from metal target'. Together they form a unique fingerprint.

Material Science

Chemical Engineering