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Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
Chen Hui Zhai, Rong Jun Zhang*, Xin Chen, Yu Xiang Zheng, Song You Wang, Juan Liu, Ning Dai, Liang Yao Chen
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
107
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(Scopus)