Dual-axis capacitive sensing for a 2D electrostatic comb-drive micromirror with polymer-filled isolation trenches

Yingchao Cao, Yilong Jia, Ruihao Zhang, Yaoyu Deng, Hua Wang, Chongshu Shan, Yiming Yang, Boyu Wei, Wenbiao Zhou, Xiaoyi Wang, Huikai Xie*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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