Design and experimental validation of a linear piezoelectric micromotor for dual-slider positioning

Yuxin Peng, Huiying Wang, Shu Wang, Jian Wang, Jie Cao, Haoyong Yu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

In this paper, a linear piezoelectric micromotor for dual-slider positioning by a single piezoelectric element (PZT) is proposed. A slider 1 and a permanent magnet are connected by the PZT, and a slider 2 is placed on the permanent magnet by the magnetic force. The slider 1 is a small steel cuboid and can be clamped and released by an electromagnet base. When it is released, it can be driven by impact friction force generated by the PZT. When it is clamped, it keeps stationary, and the slider 2 can be positioned based on the smooth impact friction drive of the micromotor. Both the sliders can be positioned independently with a long motion range as well as a high positioning resolution. Due to a single PZT used in the micromotor and miniaturized design of the mechanism, the proposed micromotor has been constructed with a compact size as well as a relatively high loading capacity.

Original languageEnglish
Pages (from-to)2363-2370
Number of pages8
JournalMicrosystem Technologies
Volume23
Issue number7
DOIs
Publication statusPublished - 1 Jul 2017
Externally publishedYes

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