Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform

Jinkui Wang, Wenzhong Lou, Dakui Wang*, Hengzhen Feng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

This paper proposes a silicon-based micro-electro-mechanical systems (MEMS) tuning fork gyroscope designed for high-g shock environments. The results obtained by a shock experiment demonstrate that MEMS gyroscopes can still work well after a load of 30,000 g is applied to the y-axis. This MEMS gyroscope is double symmetrical and connected by middle coupling beams. The results obtained by mathematical analysis and finite element analysis revealed that the designed solid stoppers are helpful in improving the gyroscope’s shock resistance. The high aspect-ratio structures were fabricated by an efficient fabrication process using a silicon-on-glass wafer. To investigate the mechanical characteristics of the fabricated gyroscopes, the silicone’s fracture strength and Young’s modulus were obtained by conducting tensile tests. The working frequencies of the gyroscope were designed as 4000 Hz, and the driving and sensing modes in the test were 4095 Hz and 4137 Hz, respectively.

Original languageEnglish
Pages (from-to)4577-4586
Number of pages10
JournalMicrosystem Technologies
Volume25
Issue number12
DOIs
Publication statusPublished - 1 Dec 2019

Fingerprint

Dive into the research topics of 'Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform'. Together they form a unique fingerprint.

Cite this

Wang, J., Lou, W., Wang, D., & Feng, H. (2019). Design, analysis, and fabrication of silicon-based MEMS gyroscope for high-g shock platform. Microsystem Technologies, 25(12), 4577-4586. https://doi.org/10.1007/s00542-019-04596-9