Dependence of Creep Strain and Fatigue Behavior on Surface Characteristics of Resistive Strain Gauges

Yinming Zhao, Siyang Tan, Chaofan Zhang, Yang Liu, Linglu Wang, Yongqian Li*, Qun Hao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Creep behavior and fatigue life are important performance indexes that affect the long-term stability of resistive strain gauges. The resistive strain gauges, fabricated with wet etching and resistance trimming, present micro-morphology such as textures and uneven edges on the surface and side-wall profile of sensitive grids. This paper observed the micro-morphology of the sensitive grids by microscope and analyzed its range of geometric dimensions. A sine function was used to establish equivalent geometric models for the surface textures and side-wall profile. Based on time hardening theory and the S–N curve, the dependence of micro-morphology of metal resistive strain gauges on creep behavior and fatigue life was studied. The results indicate that the roughness of micro-morphology has an influence on creep behavior and fatigue life. The surface textures and side-wall profile lead to the increase of creep strain and the decrease of fatigue life in varying degrees. When 60% of the ultimate stress of the strain gauges is loaded, the average creep strain in steady-state calculated by the maximum roughness of the side-wall profile reaches up to 6.95 times that of the perfect flat surface. Under the condition of loading 70% of the ultimate stress and the same roughness, the fatigue life led by side-wall profile could be reduced to 1/25 of the textured surface. The obtained achievements promote an understanding for optimizing the fabrication process of resistive strain gauges as well as developing high-precision and long-life force sensors.

Original languageEnglish
Article number379
JournalMicromachines
Volume13
Issue number3
DOIs
Publication statusPublished - Mar 2022

Keywords

  • Creep behavior
  • Fatigue life
  • Force sensor
  • Resistance trimming
  • Resistive strain gauge
  • Roughness
  • Sensitive grids
  • Surface roughness
  • Textures
  • Wet etching

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