Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation

Haoran Wang, Xiaoyang Zhang, Daihua Zhang, Liang Zhou, Huikai Xie

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation'. Together they form a unique fingerprint.

Engineering