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Characteristics of inductively coupled plasma (ICP) and helicon plasma in a single-loop antenna
Tianliang Zhang, Tianliang Zhang, Kaiyin Jiang, Zhongwei Liu, Lizhen Yang, Haibao Zhang, Jiting Ouyang*, Qiang Chen*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
10
Citations
(Scopus)