C面蓝宝石抛光液组分优化

Translated title of the contribution: Composition Optimization of Polishing Slurry for C-Plane Sapphire

Jian Ji, Zhiqiang Liang, Hai Zhou*, Wang Jiang, Xiangpu Ren

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

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Engineering

Material Science