Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

Yao Lu; Hongxiang Zhang; Yuan Jiang; Hao Zhang; Wei Pang; Menglun Zhang

doi:10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

Yao Lu, Hongxiang Zhang, Yuan Jiang, Hao Zhang, Wei Pang^*, Menglun Zhang

^*Corresponding author for this work

State Key Laboratory of Precision Measuring Technology and Instruments

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm²N^-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	854-857
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346690
Publication status	Published - 24 Apr 2018
Externally published	Yes
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

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10.1109/MEMSYS.2018.8346690

Cite this

Lu, Y., Zhang, H., Jiang, Y., Zhang, H., Pang, W., & Zhang, M. (2018). Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 854-857). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346690

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title = "Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors",

abstract = "In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.",

author = "Yao Lu and Hongxiang Zhang and Yuan Jiang and Hao Zhang and Wei Pang and Menglun Zhang",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",

year = "2018",

month = apr,

day = "24",

doi = "10.1109/MEMSYS.2018.8346690",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",

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}

Lu, Y, Zhang, H, Jiang, Y, Zhang, H, Pang, W & Zhang, M 2018, Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 854-857, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. / Lu, Yao; Zhang, Hongxiang; Jiang, Yuan et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 854-857 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zhang, Hongxiang

AU - Jiang, Yuan

AU - Zhang, Hao

AU - Pang, Wei

AU - Zhang, Menglun

PY - 2018/4/24

Y1 - 2018/4/24

N2 - In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

AB - In this paper, we measured bulk modulus of microfluidics using bulk acoustic wave (BAW) MEMS sensors. The 2.5 GHz resonant sensor interacted with fluids by longitudinal bulk acoustic waves. Measurement experiments were carried out on 1 pL glycerol-water sample droplets, and the results were compared with theoretical models. We showed that the longitudinal acoustic wave sensors are sensitive to bulk modulus of microfluidics (sensitivity of 12.42 MHzm2N-1). We also validated that the sensors are insensitive to viscosity, which is another important liquid property usually measured by shear acoustic wave sensors.

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DO - 10.1109/MEMSYS.2018.8346690

M3 - Conference contribution

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 854

EP - 857

BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018

Y2 - 21 January 2018 through 25 January 2018

ER -

Lu Y, Zhang H, Jiang Y, Zhang H, Pang W, Zhang M. Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 854-857. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346690

Bulk modulus measurement of microfluidics by longitudinal bulk acoustic wave sensors

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