Batch-Mode μuSM Process for Surrounding Air Cavity and TCV Holes of AlN Ceramic Substrate Application for Patch Antenna

Yanming Xia, Shenglin Ma, Lu Song, Tao Wang, Zetian Wang, Xuanyang Li, Jing Chen, Yufeng Jin, Wei Wang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

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