Atomic Layer Deposition of Al2O3 Directly on 2D Materials for High-Performance Electronics

Na Li, Zheng Wei, Jing Zhao, Qinqin Wang, Cheng Shen, Shuopei Wang, Jian Tang, Rong Yang*, Dongxia Shi, Guangyu Zhang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

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Material Science