Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing

Vasyl Kanevskii, Serhii Kolienov, Valerii Grygoruk, Oleksandr Stelmakh, Hao Zhang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Analysis of the Spatial-Frequency Characteristics of the Photo-Assisted Method of a Quartz Rough Surface Nano-Polishing'. Together they form a unique fingerprint.

Engineering

Material Science