Adaptive laser shock micro-forming for MEMS device applications

R. Zou, M. Wang, S. L. Wang, S. Li, C. Zhang, L. Deng, Y. F. Lu, K. P. Chen*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Adaptive laser shock micro-forming for MEMS device applications'. Together they form a unique fingerprint.

Engineering

Physics