A novel surface polishing method and its fundamental performance in ultra-fine polishing of wafer

Jianguo Cao, Jianyong Li*, Meng Nie, Pengzhe Zhu, Chaoyue Zhao, Jingjing Zhang, Tong Xuan, Jinhuan Xu, Baozhen Li

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

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Engineering