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A novel MEMS fractal inductor based on Hilbert curve
Gang Wang
*
,
Lixin Xu
,
Ting Wang
*
Corresponding author for this work
School of Automation
School of Mechatronical Engineering
Research output
:
Contribution to conference
›
Paper
›
peer-review
12
Citations (Scopus)
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Engineering
Microelectromechanical System
100%
Monolithic Microwave Integrated Circuits
40%
Thin Films
20%
Satisfies
20%
Silicon Substrate
20%
Fabrication Technique
20%
Planers
20%
Back Side
20%