A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology

Xiaoyi Wang, Zetao Fang, Xiangyu Song, Wei Xu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Fingerprint

Dive into the research topics of 'A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology'. Together they form a unique fingerprint.

Material Science

Engineering