TY - GEN
T1 - A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement
AU - Wang, Xiaoyi
AU - Chen, Xingru
AU - Deng, Yang
AU - Cheung, Yik Kin
AU - Jiang, Peng
AU - Xu, Wei
AU - Yu, Hongyu
N1 - Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.
AB - For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.
KW - Flow sensor
KW - flexible sensor
KW - performance enhancement
KW - quadruple heaters
KW - suspended structure
UR - http://www.scopus.com/inward/record.url?scp=85126395602&partnerID=8YFLogxK
U2 - 10.1109/MEMS51670.2022.9699452
DO - 10.1109/MEMS51670.2022.9699452
M3 - Conference contribution
AN - SCOPUS:85126395602
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 652
EP - 655
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -
