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A CMOS-MEMS lateral-axis gyroscope
H. Xie
*
, G. K. Fedder
*
Corresponding author for this work
Carnegie Mellon University
Research output
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Contribution to conference
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Paper
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peer-review
46
Citations (Scopus)
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Engineering
Microelectromechanical System
100%
Actuation
100%
Drive Mode
100%
Resonant Frequency
100%
Experimental Result
50%
Atmospheric Pressure
50%
Interface Circuit
50%
Capacitive
50%
Single Chip
50%
Sense Mode
50%
Polysilicon
50%