超高空间分辨率光反射仪关键技术进展

Translated title of the contribution: Advances of key technologies on optical reflectometry with ultra-high spatial resolution

Shuai Wang, Bin Wang, Qingwen Liu, Jiangbing Du, Xinyu Fan*, Zuyuan He

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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