用于移相干涉的高精度可伸缩PZT驱动电源技术

Translated title of the contribution: High-precision retractable PZT driving power technology for phase-shifting interferometry

Chao Zheng, Qi He, Shi Zhou, Shuai Yang, Jian Cui, Lirong Qiu*

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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Physics

Engineering