混合介质层类同轴垂直硅通孔的高频性能研究

Translated title of the contribution: Study on High Frequency Characterizations of Coaxially Shielded TSV with Mixed Dielectric Layer

Yingtao Ding, Yiding Wang, Lei Xiao, Qining Wang, Zhiwei Chen

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

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Material Science

Engineering