强光元件逆向哈特曼在位检测装置误差敏感因素分析与验证

Translated title of the contribution: Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry

Shanshan Wang, Feng Shi*, Shuo Qiao, Bowen Xu, Qun Hao, Ci Song, Guipeng Tie, Ye Tian, Dede Zhai, Xing Peng

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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