基于空心电极增强的容性耦合射频等离子体特性

Translated title of the contribution: Characteristics of Enhanced Capacitively-coupled Radio Frequency Plasma Based on Hollow Electrode Structure

Zhili Bai, Feng He*, Peizhen Li, Liuliang He, Jinsong Miao, Jiting Ouyang

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

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