Yanqiu Li

Engineering

1. Lithography 100%
2. Numerical Aperture 56%
3. Extreme-Ultraviolet Lithography 47%
4. Nodes 30%
5. Optimization Method 27%
6. Simulation Result 17%
7. Mueller Matrix 16%
8. Critical Dimension 16%
9. Design Method 14%
10. Compressive Sensing 13%
11. Process Window 12%
12. Polarization State 11%
13. Fits and Tolerances 10%
14. Interferogram 10%
15. Optical Lithography 10%
16. Imaging Performance 10%
17. Experimental Result 9%
18. Instrument Calibration 9%
19. Phase Shift 9%
20. Aerial Image 8%
21. Demonstrates 7%
22. Optimization Approach 7%
23. Least Square 6%
24. Optical Systems 6%
25. Cost Function 6%
26. Polarized Light 6%
27. Retardation 6%
28. Polarization Effect 6%
29. Obtains 6%
30. Wireless Sensor Node 5%
31. Root Mean Square 5%
32. Optical Design 5%
33. Field Point 5%
34. Subaperture 5%
35. Incident Angle 5%
36. Light Field 5%
37. Kirchhoff 5%
38. Optical Performance 5%