Wafer map Anomaly Detection Driven by Contrast Learning and Vision Transformer Model

Zhonghao Chang, Kaiyuan Chen, Te Han*, Jiajia Xu, Ke Feng, He Li

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

With the rapid development of the integrated circuit industry, wafers, as the carrier for chip manufacturing, have made their production efficiency and quality the focal point of industry attention. Therefore, timely anomaly detection on wafer maps holds significant importance. Wafer maps provide a visual representation of the test results of each die on the wafer and effectively present data along with its associated spatial information. Timely anomaly detection on these maps is crucial for enhancing product quality and production efficiency. This paper introduces an anomaly detection method for wafer maps that leverages the Vision Transformer (ViT) architecture and a contrastive learning mechanism. The ViT architecture is employed to deeply model the global information of wafer maps, followed by the use of a contrastive learning mechanism to capture key features that reflect healthy information in samples of healthy wafer maps. This method not only achieves leading performance but also demonstrates robust resilience under noisy and sample contamination conditions. This achievement provides strong support for the practical application of anomaly detection in wafer maps.

源语言英语
主期刊名15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024
编辑Huimin Wang, Steven Li
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9798350354010
DOI
出版状态已出版 - 2024
活动15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 - Beijing, 中国
期限: 11 10月 202413 10月 2024

出版系列

姓名15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024

会议

会议15th IEEE Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024
国家/地区中国
Beijing
时期11/10/2413/10/24

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引用此

Chang, Z., Chen, K., Han, T., Xu, J., Feng, K., & Li, H. (2024). Wafer map Anomaly Detection Driven by Contrast Learning and Vision Transformer Model. 在 H. Wang, & S. Li (编辑), 15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024 (15th Global Reliability and Prognostics and Health Management Conference, PHM-Beijing 2024). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PHM-BEIJING63284.2024.10874552