Versatile generation and manipulation of phase-structured light beams using on-chip subwavelength holographic surface gratings

Phase-structured light beams carrying orbital angular momentum (OAM) have a wide range of applications ranging from particle trapping to optical communication. Many techniques exist to generate and manipulate such beams but most suffer from bulky configurations. In contrast, silicon photonics enables the integration of various functional components on a monolithic platform, providing a way to miniaturize optical systems to chip level. Here, we propose a series of on-chip subwavelength holographic waveguide structures that can convert the in-plane guided modes into desired wavefronts and realize complex free-space functions, including the generation of complex phase-structured light beams, arbitrarily directed vortex beam emission and vortex beam focusing. We use a holographic approach to design subwavelength holographic surface gratings, and demonstrate broadband generation of Laguerre-Gaussian (LG) and linearly polarized (LP) modes. Moreover, by assigning appropriate geometric phase profiles to the spiral phase distribution, the off-chip vortex beam manipulation including arbitrarily directed emission and beam focusing scenarios can be realized. In the experiment, directed vortex beam emission is realized by using a fabricated tilt subwavelength holographic fork grating. The proposed waveguide structures enrich the functionalities of dielectric meta-waveguide structures, which can find potential applications in optical communication, optical trapping, nonlinear interaction and imaging.