Ultrafine surface finishing of fused silica glass using MCF magnetic compound fluid wheel

Y. Wu*, L. Jiao, H. Guo, M. Fujimoto, K. Shimada

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

2 引用 (Scopus)

摘要

This paper aims to develop an alternative novel technique for the high efficiency and ultrafine surface finishing of fused silica glass. A semi-fixed abrasive tool named MCF magnetic compound fluid wheel is produced by distributing a certain volume of MCF slurry uniformly over the whole circumference surface of ring-shaped permanent magnets. An experimental rig is constructed in house followed by experimental investigations involving effects of the MCF wheel construction and process parameters on the material removal and work-surface roughness. As a result,the performance of the developed MCF wheel in the surface finishing of fused silica glass has been confirmed, and the appropriate wheel construction and process parameters have been determined in terms of the material removal rate, the flatness of polishing area and the surface roughness, showing an extremely smooth work-surface with surface roughness of Ra0.92nm has been achieved successfully in the current work.

源语言英语
主期刊名Advances in Abrasive Technology XV
3-9
页数7
DOI
出版状态已出版 - 2012
活动15th International Symposium on Advances in Abrasive Technology, ISAAT 2012 - , 新加坡
期限: 25 9月 201228 9月 2012

出版系列

姓名Advanced Materials Research
565
ISSN(印刷版)1022-6680

会议

会议15th International Symposium on Advances in Abrasive Technology, ISAAT 2012
国家/地区新加坡
时期25/09/1228/09/12

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