@inproceedings{bfbf5560fbce4c16875c759c88e3eb83,
title = "Ultra-Large Pixel Array Photothermal Transducer and its Thermal Performance Prediction Strategy",
abstract = "A photothermal (PT) transducer with beyond 4000 × 4000 pixels is proposed and fabricated. A thermal performance predication strategy for this ultra-large pixel array is proposed for the first time. Two different pixel patterns are fabricated and tested to explore their steady and transient thermal properties. Experimental results indicate this transducer shows great potential of high frame rate, and simulation results show that the microstructure design of pixel plays an important role in the thermal properties. The proposed PT transducer is promising in high resolution and its fabrication is compatible to low-cost and mass production.",
keywords = "Photothermal transducer, thermal performance predication strategy, ultra-large pixel array",
author = "Defang Li and Jinying Zhang and Jiushuai Xu and Erwin Peiner and Zhuo Li and Xin Wang and Suhui Yang and Yanze Gao",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 ; Conference date: 15-01-2023 Through 19-01-2023",
year = "2023",
doi = "10.1109/MEMS49605.2023.10052516",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1147--1150",
booktitle = "2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023",
address = "United States",
}