TY - GEN
T1 - Trench-filled cellular parylene structure for piezoelectric polymer electret
AU - Feng, Y.
AU - Hagiwara, K.
AU - Iguchi, Y.
AU - Suzuki, Y.
PY - 2012
Y1 - 2012
N2 - In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.
AB - In this paper, we report a novel cellular polymer electret based on trench-filled parylene, and demonstrate its performance for low-resonant- frequency in-plane electromechanical transducer. Cellular parylene structures with 15 μm-wide beams have been successfully microfabricated, and charges are implanted onto the vertical walls with soft X-ray charging as artificial dipoles. The dipole moments are changed due to the cellular gap extension/shrinkage, producing voltage across the cellular structures. With our early prototype, 0.116 Vp-p output has been obtained at 28 Hz and 1 G acceleration, showing the feasibility of MEMS-based multi-layer cellular polymer electrets for in-plane piezoelectric transducers.
UR - http://www.scopus.com/inward/record.url?scp=84860476168&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2012.6170376
DO - 10.1109/MEMSYS.2012.6170376
M3 - Conference contribution
AN - SCOPUS:84860476168
SN - 9781467303248
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1189
EP - 1192
BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
T2 - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Y2 - 29 January 2012 through 2 February 2012
ER -