@inproceedings{27e5574638e740cd8d228c558e1c9cc8,
title = "The vibration and measurement of drive mode of MEMS gyroscope based on the image processing",
abstract = "This paper introduces the working principle of the micromacined gyroscope, and establishes the drive equation of it. By solving the differential Equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the vibration of the drive mode of the micromachined gyroscope. And it puts forward a novel displacement detect algorithm that based on the image processing, and with Matlab it verifies the analytical solution and the amplitude-frequency characteristics of drive mode of the micromachined gyroscope. This helps the study on the vibration of the micromacined gyroscope, and provides a new way to measure MEMS.",
keywords = "Drive mode, Gyroscope, Image, MEMS, Measurement, Vibration",
author = "Zhao Jie and Yao Fenglin and Gao Shiqiao and Gao Chongren",
year = "2012",
doi = "10.4028/www.scientific.net/AMM.197.423",
language = "English",
isbn = "9783037854723",
series = "Applied Mechanics and Materials",
pages = "423--427",
booktitle = "Applied Sciences and Engineering",
note = "International Conference on Mechanical Science and Engineering, ICMSE 2012 ; Conference date: 20-07-2012 Through 22-07-2012",
}