TY - JOUR
T1 - The tunable dielectric properties of sputtered yttrium oxide films
AU - Lei, Pei
AU - Chen, Xiaoting
AU - Yan, Yue
AU - Zhu, Jiaqi
N1 - Publisher Copyright:
© 2021, The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature.
PY - 2021/2
Y1 - 2021/2
N2 - Yttrium oxide film is an important dielectric material, which has been widely used in the scientific and engineering fields. The microstructures of yttrium oxide films can be modified effectively by adjusting the substrate temperature and bias voltage, which also have effects on dielectric properties of yttrium oxide films. In this work, the dielectric properties of yttrium oxide films grown on Pt film, which exhibit the distinct microstructures with cubic-phase and monoclinic-phase domination manipulated by different substrate temperatures and bias voltages, have been investigated systematically. High substrate temperature as well as large bias voltage can decrease the loss tangent and enhance the dielectric constants up to 56 and 40, respectively. Furthermore, the driven force of temperature is more favorable than that of bias voltage for enhanced dielectric constant due to fewer defects.
AB - Yttrium oxide film is an important dielectric material, which has been widely used in the scientific and engineering fields. The microstructures of yttrium oxide films can be modified effectively by adjusting the substrate temperature and bias voltage, which also have effects on dielectric properties of yttrium oxide films. In this work, the dielectric properties of yttrium oxide films grown on Pt film, which exhibit the distinct microstructures with cubic-phase and monoclinic-phase domination manipulated by different substrate temperatures and bias voltages, have been investigated systematically. High substrate temperature as well as large bias voltage can decrease the loss tangent and enhance the dielectric constants up to 56 and 40, respectively. Furthermore, the driven force of temperature is more favorable than that of bias voltage for enhanced dielectric constant due to fewer defects.
KW - Dielectric constants
KW - MIM
KW - Magnetron sputtering
KW - Yttrium oxide film
UR - http://www.scopus.com/inward/record.url?scp=85099178650&partnerID=8YFLogxK
U2 - 10.1007/s00339-021-04280-8
DO - 10.1007/s00339-021-04280-8
M3 - Article
AN - SCOPUS:85099178650
SN - 0947-8396
VL - 127
JO - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
IS - 2
M1 - 99
ER -