@inproceedings{60fc6e0996c049b0b40568f238ff7ddc,
title = "The effects of process parameters on the properties of ITO films grown by ion beam-assisted deposition using 90In-10Sn (wt%) alloy",
abstract = "ITO films have been grown by ion beam-assisted deposition (IBAD) using 90In-10Sn (wt%) alloy. The electrical and optical properties of these films have been investigated as a function of oxygen flux, evaporation rate, ion energy and substrate temperature during deposition. The films with resistivity as low as 2.4 × 10-3 Ω · cm (at room temperature) and 8× 0-4Ω · cm (at 150°C) have been deposited, and the transmittance of all samples in the visible range is above 82%. The deposited films at room temperature are polycrystalline with a preferred orientation of (222) and the size of crystal particle is about 21nm, and the surface roughness for the ITO films grown at room temperature is Ra=5.32nm.",
keywords = "ITO films, Ion beam-assisted reactive deposition, Low temperature",
author = "Zhinong Yu and Longfeng Xiang and We Xue and Huaqing Wang and Weiqiang Lu",
year = "2008",
doi = "10.1117/12.791176",
language = "English",
isbn = "9780819467669",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "International Symposium on Photoelectronic Detection and Imaging 2007",
note = "International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings ; Conference date: 09-09-2007 Through 12-09-2007",
}