TY - JOUR
T1 - Technologies and applications of silicon-based micro-optical electromechanical systems
T2 - A brief review
AU - Chen, Shanshan
AU - Zhang, Yongyue
AU - Hong, Xiaorong
AU - Li, Jiafang
N1 - Publisher Copyright:
© 2022 Chinese Institute of Electronics.
PY - 2022/8
Y1 - 2022/8
N2 - Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.
AB - Micro-optical electromechanical systems (MOEMS) combine the merits of micro-electromechanical systems (MEMS) and micro-optics to enable unique optical functions for a wide range of advanced applications. Using simple external electromechanical control methods, such as electrostatic, magnetic or thermal effects, Si-based MOEMS can achieve precise dynamic optical modulation. In this paper, we will briefly review the technologies and applications of Si-based MOEMS. Their basic working principles, advantages, general materials and micromachining fabrication technologies are introduced concisely, followed by research progress of advanced Si-based MOEMS devices, including micromirrors/micromirror arrays, micro-spectrometers, and optical/photonic switches. Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing, they have several promising applications in optical communications, digital light processing, and optical sensing. Finally, future research and development prospects of Si-based MOEMS are discussed.
KW - MOEMS
KW - Si-based micromachining technology
KW - micro-spectrometer
KW - micromirror
KW - optical switches
UR - http://www.scopus.com/inward/record.url?scp=85138987100&partnerID=8YFLogxK
U2 - 10.1088/1674-4926/43/8/081301
DO - 10.1088/1674-4926/43/8/081301
M3 - Review article
AN - SCOPUS:85138987100
SN - 1674-4926
VL - 43
JO - Journal of Semiconductors
JF - Journal of Semiconductors
IS - 8
M1 - 081301
ER -