TY - GEN
T1 - System Reliability Analysis of MEMS Gyroscope with Multiple Failure Modes
AU - Feng, Hengzhen
AU - Lou, Wenzhong
AU - Wang, Dakui
AU - Zheng, Fuquan
AU - Liao, Maohao
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/11/9
Y1 - 2018/11/9
N2 - Aiming at the limitation of traditional MEMS gyroscope reliability analysis method, this paper presents a reliability calculation method for MEMS gyroscope about failure mechanism, failure process and failure mode correlation. The problem which the MEMS gyroscope is easy to be affected by technology, structure, gap, material and so on, the failure mechanism is complex, the reliability data is short and the reliability is difficult to predict are solved. The system reliability of MEMS gyroscope is estimated. Through the calculation and analysis among much reliability analysis method, G-PCM method is confirmed. The reliability of the MEMS gyroscope is calculated to be 0.999169, which can meet the requirements of the reliability of the key products.
AB - Aiming at the limitation of traditional MEMS gyroscope reliability analysis method, this paper presents a reliability calculation method for MEMS gyroscope about failure mechanism, failure process and failure mode correlation. The problem which the MEMS gyroscope is easy to be affected by technology, structure, gap, material and so on, the failure mechanism is complex, the reliability data is short and the reliability is difficult to predict are solved. The system reliability of MEMS gyroscope is estimated. Through the calculation and analysis among much reliability analysis method, G-PCM method is confirmed. The reliability of the MEMS gyroscope is calculated to be 0.999169, which can meet the requirements of the reliability of the key products.
KW - MEMS gyroscope
KW - failure mechanism
KW - failure mode correlation
KW - failure process
KW - reliability analysis method
UR - http://www.scopus.com/inward/record.url?scp=85058228449&partnerID=8YFLogxK
U2 - 10.1109/ICMIC.2018.8529889
DO - 10.1109/ICMIC.2018.8529889
M3 - Conference contribution
AN - SCOPUS:85058228449
T3 - 10th International Conference on Modelling, Identification and Control, ICMIC 2018
BT - 10th International Conference on Modelling, Identification and Control, ICMIC 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 10th International Conference on Modelling, Identification and Control, ICMIC 2018
Y2 - 2 July 2018 through 4 July 2018
ER -