Sub-Surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-Infrared Femtosecond Laser Pulses

Iaroslav Gnilitskyi*, Vitaly Gruzdev, Xiaoqing He, Olga Sergaeva, Pengfei Ji, Tommi White, Yuwen Zhang

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

Structure of subsurface layer beneath silicon single-crystal surface periodically nanostructured by femtosecond laser suggests significant contribution of laser-driven defect generation to formation of periodic surface ripples by few laser pulses in a broad fluence range.

源语言英语
主期刊名2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
出版商Institute of Electrical and Electronics Engineers Inc.
ISBN(电子版)9781943580453
出版状态已出版 - 2 7月 2018
已对外发布
活动2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, 香港
期限: 29 7月 20183 8月 2018

出版系列

姓名2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

会议

会议2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
国家/地区香港
Wanchai
时期29/07/183/08/18

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