摘要
The computation of electrostatic field distribution for conical immersion lens was studied by boundary element method, and the electron trajectories under initial conditions were traced by a set of curvilinear paraxial trajectory equations and practical trajectory equations, then the electron optical parameters such as cardinal points of lens were determined. The computation results are in good agreement with the values obtained by analytical asymptotical method.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 17-24 |
| 页数 | 8 |
| 期刊 | Tien Tzu Hsueh Pao/Acta Electronica Sinica |
| 卷 | 22 |
| 期 | 6 |
| 出版状态 | 已出版 - 6月 1994 |
| 已对外发布 | 是 |
指纹
探究 'Study on electron optical system for conical immersion lens' 的科研主题。它们共同构成独一无二的指纹。引用此
Zhang, L., Zhou, L., Jin, W., & Fang, E. (1994). Study on electron optical system for conical immersion lens. Tien Tzu Hsueh Pao/Acta Electronica Sinica, 22(6), 17-24.