TY - JOUR
T1 - Study of pressure measurement technique using MEMS pressure sensors integrated on built-in printed circuit board
AU - Liao, Binlong
AU - Pu, Xiang
AU - Bi, Zehua
AU - He, Guosheng
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2024
Y1 - 2024
N2 - Surface pressure measurement is an important part of aerodynamic research. In this study, a novel pressure measurement system based on Micro-Electro Mechanical System (MEMS) pressure sensors was designed and fabricated. The selected integrated silicon piezoresistive sensors are characterized by small size, low cost, high accuracy, and easy integration. Multi-channel simultaneous measurement of surface pressure is realized by integrating multiple sensors in a self-designed printed circuit board (PCB). A U-shape tube differential pressure device was used to calibrate the constructed pressure measurement system and the measured results are compared with those of commercial sensors. It is shown that the MEMS sensor output had good accuracy and linearity. The pressure measurement system was used to measure the pressure on the surface of a circular cylinder and a NACA0015 airfoil in a wind tunnel. The results further verified the feasibility and reliability of the present measurement system. Compared with other pressure measurement methods, the surface pressure measurement method based on MEMS sensors developed in this paper greatly reduces the cost, and at the same time has good customizability, which can effectively expand the application scenarios and scope of the pressure measurement technique.
AB - Surface pressure measurement is an important part of aerodynamic research. In this study, a novel pressure measurement system based on Micro-Electro Mechanical System (MEMS) pressure sensors was designed and fabricated. The selected integrated silicon piezoresistive sensors are characterized by small size, low cost, high accuracy, and easy integration. Multi-channel simultaneous measurement of surface pressure is realized by integrating multiple sensors in a self-designed printed circuit board (PCB). A U-shape tube differential pressure device was used to calibrate the constructed pressure measurement system and the measured results are compared with those of commercial sensors. It is shown that the MEMS sensor output had good accuracy and linearity. The pressure measurement system was used to measure the pressure on the surface of a circular cylinder and a NACA0015 airfoil in a wind tunnel. The results further verified the feasibility and reliability of the present measurement system. Compared with other pressure measurement methods, the surface pressure measurement method based on MEMS sensors developed in this paper greatly reduces the cost, and at the same time has good customizability, which can effectively expand the application scenarios and scope of the pressure measurement technique.
UR - http://www.scopus.com/inward/record.url?scp=85202883247&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/2820/1/012091
DO - 10.1088/1742-6596/2820/1/012091
M3 - Conference article
AN - SCOPUS:85202883247
SN - 1742-6588
VL - 2820
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
IS - 1
M1 - 012091
T2 - 2024 3rd International Conference on Aerospace, Aerodynamics and Mechatronics Engineering, AAME 2024
Y2 - 12 April 2024 through 14 April 2024
ER -