TY - CONF
T1 - Structural anisotropic effect on the nanocutting of 6H-Silicon Carbide
AU - Wu, Zhonghuai
AU - Liu, Weidong
AU - Zhang, Liangchi
N1 - Publisher Copyright:
© ISAAT 2017.All right reserved.
PY - 2017
Y1 - 2017
N2 - 6H-silicon carbide (6H-SiC) is an excellent material for fabricating die and high performance mirrors because of its desirable engineering properties such as ultrahigh strength and outstanding thermal and chemical stabilities. However, it is also a difficult-to-machine material due to its hardness, brittleness and anisotropy. This paper presents an investigation on the structural anisotropic effect on the nanocutting of 6H-SiC with the aid of large-scale molecular dynamics simulations. Six typical combinations of crystal planes and cutting directions were selected, i.e., (0001) < 1120 >, (0001) < 1100 >, (1120) < 1100 >, (1120) < 0001 >, (1100) < 0001 > and (1100) < 1120 > . The cutting-induced deformation morphology, deformation mechanism, depth of subsurface damage and elastic recovery were analysed and compared. It was found that the resultant deformation morphology changes significantly when the cutting was conducted under different conditions, suggesting a strong anisotropic effect. The depth of the subsurface damage varies from 2.64 nm ((0001) < 1100 >) to 5.66 nm ((1120) < 0001 >). Elastic recovery varies from 0.131 nm ((1100) < 1120 >) to 0.295 nm ((1120) < 0001 >). These are caused by the anisotropic effect on the nucleation of dislocations and phase transitions in the material. It was identified that the basal plane (0001) is the most machinable plane and the cutting on plane (0001) along < 1100 > is the most machinable crystal combination; while cutting on (1120) plane along <0001> direction gives the most unfavourable outcome.
AB - 6H-silicon carbide (6H-SiC) is an excellent material for fabricating die and high performance mirrors because of its desirable engineering properties such as ultrahigh strength and outstanding thermal and chemical stabilities. However, it is also a difficult-to-machine material due to its hardness, brittleness and anisotropy. This paper presents an investigation on the structural anisotropic effect on the nanocutting of 6H-SiC with the aid of large-scale molecular dynamics simulations. Six typical combinations of crystal planes and cutting directions were selected, i.e., (0001) < 1120 >, (0001) < 1100 >, (1120) < 1100 >, (1120) < 0001 >, (1100) < 0001 > and (1100) < 1120 > . The cutting-induced deformation morphology, deformation mechanism, depth of subsurface damage and elastic recovery were analysed and compared. It was found that the resultant deformation morphology changes significantly when the cutting was conducted under different conditions, suggesting a strong anisotropic effect. The depth of the subsurface damage varies from 2.64 nm ((0001) < 1100 >) to 5.66 nm ((1120) < 0001 >). Elastic recovery varies from 0.131 nm ((1100) < 1120 >) to 0.295 nm ((1120) < 0001 >). These are caused by the anisotropic effect on the nucleation of dislocations and phase transitions in the material. It was identified that the basal plane (0001) is the most machinable plane and the cutting on plane (0001) along < 1100 > is the most machinable crystal combination; while cutting on (1120) plane along <0001> direction gives the most unfavourable outcome.
KW - Anisotropic effect
KW - Deformation mechanism
KW - Elastic recovery
KW - Molecular dynamics
KW - Silicon carbide
KW - Subsurface damage
UR - http://www.scopus.com/inward/record.url?scp=85094103487&partnerID=8YFLogxK
M3 - Paper
AN - SCOPUS:85094103487
SP - 1039
EP - 1044
T2 - 20th International Symposium on Advances in Abrasive Technology, ISAAT 2017
Y2 - 3 December 2017 through 6 December 2017
ER -