摘要
A micro-loading stiffness detection method for micro-miniature components with brittle and complicated structure has been proposed to achieve stiffness detection of silicon arm. This paper adopts the methord of combing finite element analysis and micro-loading experiment together. Finally, the paper analyzed the deviation of silicon arm’s stiffness values obtained by simulation and experiment, and comparatively analyzed the variation tendency of silicon arm’s stiffness value among different claws. Result shows: the silicon arm’s stiffness value and the stiffness variation tendency obtained by experiment agrees well with it which is obtained by simulation. It proves the stiffness detection method is reliable and rational to achieve the stiffness detection of silicon arm.
| 源语言 | 英语 |
|---|---|
| 页（从-至） | 1290-1295 |
| 页数 | 6 |
| 期刊 | Applied Mechanics and Materials |
| 卷 | 670-671 |
| DOI | |
| 出版状态 | 已出版 - 2014 |
| 活动 | 4th International Conference on Applied Mechanics, Materials and Manufacturing, ICAMMM 2014 - Shenzhen, 中国 期限: 23 8月 2014 → 24 8月 2014 |