摘要
This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.
| 源语言 | 英语 |
|---|---|
| 主期刊名 | MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest |
| 页 | 180-183 |
| 页数 | 4 |
| DOI | |
| 出版状态 | 已出版 - 2010 |
| 已对外发布 | 是 |
| 活动 | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, 中国 期限: 24 1月 2010 → 28 1月 2010 |
出版系列
| 姓名 | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
|---|---|
| ISSN（印刷版） | 1084-6999 |
会议
| 会议 | 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 |
|---|---|
| 国家/地区 | 中国 |
| 市 | Hong Kong |
| 时期 | 24/01/10 → 28/01/10 |
指纹
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Jia, K., Samuelson, S. R., & Xie, H. (2010). Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures. 在 MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (页码 180-183). 文章 5442537 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442537