TY - GEN
T1 - Single-wafer solution and optical phased array application of micro-mirror arrays with high fill factor and large sub-apertures
AU - Jia, Kemiao
AU - Samuelson, Sean R.
AU - Xie, Huikai
PY - 2010
Y1 - 2010
N2 - This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.
AB - This paper reports the fabrication and characterization of high-fill-factor micro-mirror arrays (MMAs) with large sub-apertures (i.e., mirror pixels). The MMAs are fabricated by a single-wafer fabrication process without any wafer bonding/transfer processes and are directly surface-mountable after the fabrication. A fabricated 4x4 MMA achieves a combined optical aperture of 6.4mmx 6.4mm with ∼90% fill factor and >±25° scan range in both x- and y- rotational axes. Preliminary optical-phased-array beam steering results are also demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=77952773795&partnerID=8YFLogxK
U2 - 10.1109/MEMSYS.2010.5442537
DO - 10.1109/MEMSYS.2010.5442537
M3 - Conference contribution
AN - SCOPUS:77952773795
SN - 9781424457649
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 180
EP - 183
BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Y2 - 24 January 2010 through 28 January 2010
ER -