Robotic automatic assembly for quasi-LIGA microparts

Yonglong Tang, Zhijing Zhang, Xin Ye, Xin Jin, Xiaofeng Zhang

科研成果: 书/报告/会议事项章节会议稿件同行评审

1 引用 (Scopus)

摘要

In order to resolve the issue of large-scale assembly for quasi-LIGA micro-parts, the purpose of this paper is to propose a novel method of orthogonal optical precise alignment. The micro-assembly experiment system set-up was constructed according to the principle of the orthogonal precise alignment. One single-position consists of three components: 3-DOF micro motion worktable, micro force feedback automatic feeding mechanism and optical alignment micro stereovision feedback control unit. The results indicate that orthogonal optical precision alignment could be used for the assembly of non-silicon MEMS devices with flat structure. The orthogonal optical alignment error is theoretically analyzed and calculated. When the prism orthogonal alignment mechanism produces the error of 1/1000°, the theoretical deviation was less than 0.9μm and the actual experimental micro-assembly platform assembly accuracy exceeded 15μm.

源语言英语
主期刊名2013 IEEE International Conference on Information and Automation, ICIA 2013
1076-1081
页数6
DOI
出版状态已出版 - 2013
活动2013 IEEE International Conference on Information and Automation, ICIA 2013 - Yinchuan, 中国
期限: 26 8月 201328 8月 2013

出版系列

姓名2013 IEEE International Conference on Information and Automation, ICIA 2013

会议

会议2013 IEEE International Conference on Information and Automation, ICIA 2013
国家/地区中国
Yinchuan
时期26/08/1328/08/13

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