Research on zero bias characteristic of MEMS accelerometer in FBW

Lun Chao Zhong, Jian Zhong Wang*, Jia Dong Shi

*此作品的通讯作者

科研成果: 书/报告/会议事项章节会议稿件同行评审

摘要

Zero bias is an important performance index of MEMS accelerometerscope. Based on the large amount of given accelerometer experiments, we study zero bias of random error properties, temperature characteristic, large overload environment variation, and then calculate MEMS accelerometer bias, bias stability, zero bias repeatability. Through least-square method,we fit temperature scale factor and temperature bias of MEMS accelerometer. The experimental results show that the compensation method has the advantages of simple operation, effectively compensation for measuring error of MEMS accelerometer which is induced by temperature, and has strong engineering using value.

源语言英语
主期刊名Micro-Nano Technology XV
出版商Trans Tech Publications Ltd.
1046-1052
页数7
ISBN(印刷版)9783038350712
DOI
出版状态已出版 - 2014
活动15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013 - Tianjin, 中国
期限: 3 11月 20136 11月 2013

出版系列

姓名Key Engineering Materials
609-610
ISSN(印刷版)1013-9826
ISSN(电子版)1662-9795

会议

会议15th Annual Conference and 4th International Conference of the Chinese Society of Micro-Nano Technology, CSMNT 2013
国家/地区中国
Tianjin
时期3/11/136/11/13

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