TY - GEN
T1 - Research on the key parameters influencing the anti-vibration capability of time-frequency-domain interferometer
AU - Zhang, Fanghua
AU - Hao, Qun
AU - Hu, Yao
AU - Zhu, Qiudong
PY - 2012
Y1 - 2012
N2 - This paper introduces a time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry, and designs an experimental system to test the anti-vibration ability of this method. In the system, a plane mirror is measured under the external vibrations simulated by the standard mirror propelled by PZT. During the measurement, each of the key parameters is assigned different values. By analyzing the testing results, the law of the parameters' influence on system anti-vibration capability can be obtained. According to the law, the optimization parameters can be determined so that the system has the maximum anti- vibration capability.
AB - This paper introduces a time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry, and designs an experimental system to test the anti-vibration ability of this method. In the system, a plane mirror is measured under the external vibrations simulated by the standard mirror propelled by PZT. During the measurement, each of the key parameters is assigned different values. By analyzing the testing results, the law of the parameters' influence on system anti-vibration capability can be obtained. According to the law, the optimization parameters can be determined so that the system has the maximum anti- vibration capability.
KW - Anti-noise
KW - Optimization parameters
KW - Phase-shifting interferometry
KW - Time-and-frequency-domain
UR - http://www.scopus.com/inward/record.url?scp=84880093805&partnerID=8YFLogxK
U2 - 10.1117/12.999642
DO - 10.1117/12.999642
M3 - Conference contribution
AN - SCOPUS:84880093805
SN - 9780819493125
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Design and Testing V
T2 - Optical Design and Testing V
Y2 - 5 November 2012 through 7 November 2012
ER -