@inproceedings{588e0f870c9b490890bc13d57372b937,
title = "Research on Partial Null Compensator with Double-sided Switching Off-axial Reflector",
abstract = "Wavefront-based aspheric metrology techniques generally require a compensation lens to compensate for the primary aberrations. To expand the adaptability of the surface to be tested, this paper proposes and demonstrates a partial null compensator structure that can switch between the front and back mirror sides. The presented compensator comprises two sets of off-axis reflecting parts and a pre-compensation spheric lens in an integrated structure. An appropriate off-axis reflection combination mode can be selected for the range of the conic coefficient of the measured surface. With the simulation result, the presented compensator can adapt to a large-scale variation of the surface conic coefficient K from - 10 to +10. The average residual wavefront aberration is no more than 1λ(PV)and 1/4 λ(RMS). The results show that the proposed structure can be efficiently applied to wavefront detection or interferometer for data post-processing.",
keywords = "off-axis mirror, partial compensator, surface measurement, wavefront aberration",
author = "Tong Yang and Lei Yang and Jie Chen and Hongbo Xie",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE.; Optical Design and Testing XII 2022 ; Conference date: 05-12-2022 Through 11-12-2022",
year = "2023",
doi = "10.1117/12.2638372",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Yongtian Wang and Kidger, {Tina E.} and Rengmao Wu",
booktitle = "Optical Design and Testing XII",
address = "United States",
}