Recent research progresses of micro-MEMS cryogenic refrigeratory

Shao Bo Liu; Yan Qiu Li; Mei Dong Liu; Yi Ke Zeng

Recent research progresses of micro-MEMS cryogenic refrigeratory

Shao Bo Liu, Yan Qiu Li, Mei Dong Liu, Yi Ke Zeng

科研成果: 期刊稿件 › 文章 › 同行评审

摘要

Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.

源语言	英语
页（从-至）	30-33
页数	4
期刊	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
卷	27
期	1
出版状态	已出版 - 2月 2005
已对外发布	是

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title = "Recent research progresses of micro-MEMS cryogenic refrigeratory",

abstract = "Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.",

keywords = "Electrocaloric effect, Ferroelectric thick film, Micro-MEMS cryogenic refrigeratory, Seeback effect, Thermoelectric thin film",

author = "Liu, {Shao Bo} and Li, {Yan Qiu} and Liu, {Mei Dong} and Zeng, {Yi Ke}",

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AB - Due to the farther micromation and integration of MEMS and ULIC, a micro-cryogenic system is in urgent need for the cryogenic refrigeration of their microchips. Thus the micro-cryogenic refrigeratory without compressor and mechanical parts is put forward to study, which is based on the MEMS fabrication technique. The fundamentals, feasibility, prospect of this research field are briefly introduced in this paper.

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KW - Ferroelectric thick film

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Recent research progresses of micro-MEMS cryogenic refrigeratory

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