TY - GEN
T1 - Proof of Concept of a Graphene-Based Resonant Accelerometer
AU - Moreno, Daniel
AU - Fan, Xuge
AU - Niklaus, Frank
AU - Guillermo Villanueva, Luis
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/1/25
Y1 - 2021/1/25
N2 - Acceleration measurements are fundamental in applications such as consumer electronics, navigation, automotive safety and Internet of things (IoT). In comparison with capacitive or piezoresistive MEMS accelerometers, resonant graphene accelerometers have the potential to be smaller. If demonstrated, they could be a step forward in miniaturization and could enable emerging applications.In this paper, accelerations are measured with a NEMS resonant accelerometer based on graphene. The devices are made of a suspended proof mass attached by graphene ribbons [1]-[3]. For device evaluation, they are attached to a shaker to produce accelerations. Using a Laser Doppler Vibrometer, the changes in the resonant frequency of the devices caused by the acceleration are quantified. The results show a linear dependence between the shifts in resonance of the devices and input accelerations at 160 Hz.
AB - Acceleration measurements are fundamental in applications such as consumer electronics, navigation, automotive safety and Internet of things (IoT). In comparison with capacitive or piezoresistive MEMS accelerometers, resonant graphene accelerometers have the potential to be smaller. If demonstrated, they could be a step forward in miniaturization and could enable emerging applications.In this paper, accelerations are measured with a NEMS resonant accelerometer based on graphene. The devices are made of a suspended proof mass attached by graphene ribbons [1]-[3]. For device evaluation, they are attached to a shaker to produce accelerations. Using a Laser Doppler Vibrometer, the changes in the resonant frequency of the devices caused by the acceleration are quantified. The results show a linear dependence between the shifts in resonance of the devices and input accelerations at 160 Hz.
KW - Accelerometer
KW - Built-in Stresses
KW - Graphene
KW - Resonant frequency
KW - Resonator
KW - Suspended Graphene Ribbons
UR - http://www.scopus.com/inward/record.url?scp=85103454381&partnerID=8YFLogxK
U2 - 10.1109/MEMS51782.2021.9375187
DO - 10.1109/MEMS51782.2021.9375187
M3 - Conference contribution
AN - SCOPUS:85103454381
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 838
EP - 840
BT - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021
Y2 - 25 January 2021 through 29 January 2021
ER -