TY - JOUR
T1 - Process technology of aspherical mirrors manufacturing with magnetorheological finishing
AU - Cheng, H. B.
AU - Feng, Z. J.
AU - Wu, Y. B.
PY - 2004
Y1 - 2004
N2 - Aspherical optical components and systems are greatly demanded by today's optical industry. However, the manufacturing and metrology of aspheric optics remains a difficult task for opticians. For high precision aspheric mirror's quick fabrication, computer controlled magnetorheological finishing (MRF) has proven to be a reasonable approach. In MRF, magnetically stiffened magnetorheological (MR) abrasive fluid flows through a preset converging gap that is formed by a workpiece surface and a moving rigid wall, to create precise material removal and polishing. Tsinghua University recently completed a project with MRF technology, in which a 66 mm diameter, f/5 parabolic mirror is polished to the shape accuracy of λ/30 rms (working wavelength λ=0.6328 μm) and the surface roughness of 0.6739 nm Ra. In this paper, working processes are designed and experiments are carried out on the features of MRF. The results show that the required convergent speed, surface roughness and figure precision could be achieved with high efficiency.
AB - Aspherical optical components and systems are greatly demanded by today's optical industry. However, the manufacturing and metrology of aspheric optics remains a difficult task for opticians. For high precision aspheric mirror's quick fabrication, computer controlled magnetorheological finishing (MRF) has proven to be a reasonable approach. In MRF, magnetically stiffened magnetorheological (MR) abrasive fluid flows through a preset converging gap that is formed by a workpiece surface and a moving rigid wall, to create precise material removal and polishing. Tsinghua University recently completed a project with MRF technology, in which a 66 mm diameter, f/5 parabolic mirror is polished to the shape accuracy of λ/30 rms (working wavelength λ=0.6328 μm) and the surface roughness of 0.6739 nm Ra. In this paper, working processes are designed and experiments are carried out on the features of MRF. The results show that the required convergent speed, surface roughness and figure precision could be achieved with high efficiency.
KW - Asphere
KW - Interferometric testing
KW - Magnetic dipole
KW - Magnetorheological finishing
UR - http://www.scopus.com/inward/record.url?scp=17044388675&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/msf.471-472.6
DO - 10.4028/www.scientific.net/msf.471-472.6
M3 - Conference article
AN - SCOPUS:17044388675
SN - 0255-5476
VL - 471-472
SP - 6
EP - 10
JO - Materials Science Forum
JF - Materials Science Forum
T2 - 11th International Manufacturing Conference - Advances in Materials Manufacturing Science and Technology.
Y2 - 18 September 2004 through 20 September 2004
ER -